Nanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography

Tailoring nanostructures using copolymer nanoimprint lithography.

The generation of defect-free polymer nanostructures by nanoimprinting methods is described. Long-range nanorheology and shorter-range surface energy effects can be efficiently combined to provide alignment of copolymer lamellae over several micrometers. As an example, a perpendicular organization with respect to circular tracks is shown, demonstrating the possibility of writing ordered radial ...

Glass nanostructures fabricated by soft thermal nanoimprint

An one-step, fast and potential low cost process has been developed to fabricate silica like glass nanostructures by combining sol-gel chemistry and thermal nanoimprint. An inorganic-organic sol-gel thin film is patterned at low pressure and temperature with flexible stamps. Various geometries are achieved with a patterning resolution of about 150 nm and patterns aspect ratio higher than 4. To ...

Solid state microcavity dye lasers fabricated by nanoimprint lithography

Cyclic olefin copolymer plasma millireactors.

The novelty of this paper lies in the development of a multistep process for the manufacturing of plasma millireactors operating at atmospheric pressure. The fabrication process relies on the integration of metallic electrodes over a cyclic olefin copolymer chip by a combination of photopatterning and sputtering. The developed plasma millireactors were successfully tested by creating air discha...

Large area high density sub-20 nm SiO(2) nanostructures fabricated by block copolymer template for nanoimprint lithography.

We developed simple fabrication methods to effectively transfer the block copolymer nanopatterns to a substrate material. High aspect ratio, sub-20 nm nanopillar and nanohole structures are successfully fabricated in a SiO(2) layer in large area format, and the versatile utilities of these nanostructures as nanoimprint molds are studied. Nanoimprint lithography using these molds makes it possib...